SPAM
Surface Physics for Advanced Manufacturing
| Coordinatore | ASML NETHERLANDS B.V.
Organization address
address: DE RUN 6501 contact info |
| Nazionalità Coordinatore | Netherlands [NL] |
| Totale costo | 4˙300˙696 € |
| EC contributo | 4˙300˙696 € |
| Programma | FP7-PEOPLE
Specific programme "People" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013) |
| Code Call | FP7-PEOPLE-2007-1-1-ITN |
| Funding Scheme | MC-ITN |
| Anno di inizio | 2008 |
| Periodo (anno-mese-giorno) | 2008-10-01 - 2012-09-30 |
Partecipanti
| # | ||||
|---|---|---|---|---|
| 1 |
ASML NETHERLANDS B.V.
Organization address
address: DE RUN 6501 contact info |
NL (VELDHOVEN) | coordinator | 0.00 |
| 2 |
"NATIONAL CENTER FOR SCIENTIFIC RESEARCH ""DEMOKRITOS"""
Organization address
address: Patriarchou Gregoriou Str. contact info |
EL (AGHIA PARASKEVI) | participant | 0.00 |
| 3 |
ADIXEN VACUUM PRODUCTS SAS
Organization address
address: AVENUE DE BROGNY 98 contact info |
FR (ANNECY) | participant | 0.00 |
| 4 |
CARL ZEISS SMT AG
Organization address
address: CARL-ZEISS-STRASSE 22 contact info |
DE (OBERKOCHEN) | participant | 0.00 |
| 5 |
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Organization address
address: Kapeldreef 75 contact info |
BE (LEUVEN) | participant | 0.00 |
| 6 |
JULIUS-MAXIMILIANS UNIVERSITAET WUERZBURG
Organization address
address: SANDERRING 2 contact info |
DE (WUERZBURG) | participant | 0.00 |
| 7 |
LAVISION GMBH*
Organization address
address: ANNA VANDENHOECK RING 19 contact info |
DE (GOTTINGEN) | participant | 0.00 |
| 8 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Organization address
address: Schoemakerstraat 97 contact info |
NL (DEN HAAG) | participant | 0.00 |
| 9 |
TECHNISCHE UNIVERSITEIT DELFT
Organization address
address: Stevinweg 1 contact info |
NL (DELFT) | participant | 0.00 |
| 10 |
UNIVERSITAET STUTTGART
Organization address
address: Keplerstrasse 7 contact info |
DE (STUTTGART) | participant | 0.00 |
| 11 |
UNIVERSITEIT TWENTE
Organization address
address: DRIENERLOLAAN 5 contact info |
NL (ENSCHEDE) | participant | 0.00 |
| 12 |
WAGENINGEN UNIVERSITY
Organization address
address: DROEVENDAALSESTEEG 4 contact info |
NL (WAGENINGEN) | participant | 0.00 |
Mappa
Word cloud
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Obiettivo del progetto (Objective)
'Today, markets demand smaller, cheaper, energy friendly and more different consumer products. Last decades micro technology has opened possibilities for mobile communication, safety and health science products. To meet these demands, the industry is encountering technological barriers that prevent the industry from evolving from the micro to a nanotechnology era. To resolve these barriers, the industry and research institutes need to initiate research programmes, and need to structure and integrate its research programmes and transfer the knowledge that as been acquired in these programmes. “New” researchers have to be trained with excellent research skills, knowledge on the specific technology, and understanding of market demands, application development, and so on. For this purpose 4 industrial, 5 academic and 3 research institutes have defined the 4 year SPAM research and training program; “a Supra-disciplinary approach to research and training in surface Physics for Advanced Manufacturing - SPAM”. Research objectives are: • identify and develop crucial knowledge in the field of surface physics, • enable the manufacturing of smaller semi-conductors and hence technology to print under 32 nm; extreme positional accuracy (< 4 nm); at competitive cost, • use this knowledge to further develop lithography technologies/tools needed for cost efficient development of nano-electronic devices, including manufacturing processes. Training objectives are: • provide personalised individual training, in particular for 16 ESR but also for 6 ER, to prepare and optimise their research in SRTs, with the help of 9 VS. • provide a network-wide training, fully exploiting the network potential and complementarities, leading to 12 network events. • transfer existing knowledge between partners through the SRTs and to transfer newly gained knowledge. Meeting the objectives are the responsibility of 4 Supra-disciplinary Research Teams (SRT) and 5 interlinking Training Exchange Pools.'
Introduzione (Teaser)
EU-funded researchers are working on an optical printing technology to enable manufacturing of nanometre-scale semiconductor integrated circuits.
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