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InLineNano

In-Line Areal Surface Measurement for Micro and Nano Production

Total Cost €

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EC-Contrib. €

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Partnership

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Project "InLineNano" data sheet

The following table provides information about the project.

Coordinator
IBS PRECISION ENGINEERING BV 

Organization address
address: Esp 201
city: EINDHOVEN
postcode: 5633AD
website: www.ibspe.com

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Netherlands [NL]
 Project website http://www.ibspe.com/page/wavelength-scanning-interferometer.htm
 Total cost 71˙429 €
 EC max contribution 50˙000 € (70%)
 Programme 1. H2020-EU.2.3.1. (Mainstreaming SME support, especially through a dedicated instrument)
2. H2020-EU.2.1.2. (INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies – Nanotechnologies)
 Code Call H2020-SMEINST-1-2014
 Funding Scheme SME-1
 Starting year 2015
 Duration (year-month-day) from 2015-05-01   to  2015-10-31

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    IBS PRECISION ENGINEERING BV NL (EINDHOVEN) coordinator 50˙000.00

Map

 Project objective

A new optical interferometry technology has been developed which delivers fast and high precision areal surface measurements for stepped and structured micro-nanoscale surfaces which cannot be measured by traditional techniques. The technology addresses the market need for high throughput, simple sample preparation and nanoscale accuracy combined with an affordable system cost. Furthermore, a unique vibration isolation innovation means that it has the flexibility to be applied both in-line and in-process. This project aims to validate its commercial potential as both a research and industrial metrology tool.

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The information about "INLINENANO" are provided by the European Opendata Portal: CORDIS opendata.

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In-Line Areal Surface Measurement for Micro and Nano Production

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