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MEMS 4.0 SIGNED

Additive Micro-Manufacturing for Plastic Micro-flectro-Mechanical-Systems

Total Cost €

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EC-Contrib. €

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Partnership

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Project "MEMS 4.0" data sheet

The following table provides information about the project.

Coordinator
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE 

Organization address
address: BATIMENT CE 3316 STATION 1
city: LAUSANNE
postcode: 1015
website: www.epfl.ch

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Switzerland [CH]
 Total cost 2˙500˙000 €
 EC max contribution 2˙500˙000 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2016-ADG
 Funding Scheme ERC-ADG
 Starting year 2017
 Duration (year-month-day) from 2017-10-01   to  2022-09-30

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE CH (LAUSANNE) coordinator 2˙500˙000.00

Map

 Project objective

The manufacturing of silicon-based MEMS today is well advanced because the micro-electro-mechanical devices for automotive, domestic, health-care and consumer electronics can be fabricated with methods from IC industry. Polymer-based MEMS have a great potential for flexible electronics and biomedical applications, but to date, the techniques to engineer functional polymers into 3D microsystems, are still at their beginning because a coherent fabrication platform with the right tools and processes does not yet exist. The field could tremendously benefit from a coordinated effort in materials and manufacturing, in particular with a focus on biocompatible plastic materials for biomedical applications. Additive manufacturing such as 3D printing and associated processing such as sintering has already started to transform traditional industry, but is not scalable much below a micrometer because the thermal processing is done in bulk or by lasers on surfaces. MEMS 4.0, in analogy with the industry 4.0 concept, aims to perform concerted research in additive manufacturing at the micro/nanoscale and associated key techniques. Using my expertise in MEMS and Nanotechnology, MEMS 4.0 will push the frontiers in new materials and new processing for MEMS by setting a focus on stencilling, printing, self-assembly and local thermal processing. This coherent processing framework will permit the use of delicate, soft, polymer materials to engineer the next generations of plastic MEMS. We are primarily targeting biodegradable implantable MEMS and permanently implantable glassy carbon MEMS. They are the most challenging to fabricate, but if successful, they also have an enormous impact for future wearables and implantables.

 Publications

year authors and title journal last update
List of publications.
2019 Matthieu Rüegg, Remo Blum, Giovanni Boero, Juergen Brugger
Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants
published pages: 1903051, ISSN: 1616-301X, DOI: 10.1002/adfm.201903051
Advanced Functional Materials 29/39 2019-11-26
2019 Matthieu Rüegg, Remo Blum, Giovanni Boero, Juergen Brugger
Transient Electronics: Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants (Adv. Funct. Mater. 39/2019)
published pages: 1970270, ISSN: 1616-301X, DOI: 10.1002/adfm.201970270
Advanced Functional Materials 29/39 2019-11-26
2019 X. Liu, J. Brugger, X. Wang
Self-charging energy harvesting system for wearables
published pages: , ISSN: , DOI:
E-MRS 2019 Spring meeting, Nice, France, May 2019 2019-08-05
2018 M. Ruegg, R. Blum, G. Boero, J. Brugger
Bioresorbable Frequency-Selective Magnesium Microresonators Fabricated by Ion Beam Etching
published pages: , ISSN: , DOI:
Microtechnologies in Medicine and Biology, Monterey, USA, 26-28 March 2018 2019-08-05

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