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SMILE SIGNED

3D Silicon Micromachining with Infrared ultrafast LasErs

Total Cost €

0

EC-Contrib. €

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Partnership

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Project "SMILE" data sheet

The following table provides information about the project.

Coordinator
BILKENT UNIVERSITESI VAKIF 

Organization address
address: ESKISEHIR YOLU 8 KM
city: BILKENT ANKARA
postcode: 6800
website: www.bilkent.edu.tr

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Turkey [TR]
 Project website http://staff.bilkent.edu.tr/onurtokel/
 Total cost 145˙845 €
 EC max contribution 145˙845 € (100%)
 Programme 1. H2020-EU.1.3.2. (Nurturing excellence by means of cross-border and cross-sector mobility)
 Code Call H2020-MSCA-IF-2014
 Funding Scheme MSCA-IF-EF-ST
 Starting year 2015
 Duration (year-month-day) from 2015-09-30   to  2017-09-29

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    BILKENT UNIVERSITESI VAKIF TR (BILKENT ANKARA) coordinator 145˙845.00

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 Project objective

The aim of the present proposal is to initiate an interdisciplinary research program to develop 3D micromachining of silicon towards novel silicon photonics and microfluidic applications. We are motivated by the myriad of applications based on 3D micromachining of glass that peaked in the early 2000's, and still continues to impact integrated photonics and microfluidics, among other fields. These successes were achieved using lasers at wavelengths for which glass is transparent (most commonly 1 um, 800 nm and their second harmonics). Most of the important results demonstrated in glass can be carried over to silicon using a long-wavelength laser (beyond 1.1 um, silicon is highly transparent), though it is clear that the physics will be different, not least because glass is amorphous and silicon is crystalline. To this end, we propose an interdisciplinary research effort that includes first developing the necessary laser technology, then building up the physical understanding, and finally pursuing high impact applications. Our approach can be summarized as:

(1) Developing a novel, femtosecond, high-energy laser at 1.5 um, (2) Developing in-situ diagnostics based on pump-probe imaging of the laser-material interaction, (3) Exploring the physics of the laser-silicon interaction, (4) Applying our physical understanding and laser technology as a platform to 3D micromachining of silicon towards novel silicon-photonics and microfluidic applications.

 Publications

year authors and title journal last update
List of publications.
2017 Onur Tokel, Ahmet Turnalı, Ghaith Makey, Parviz Elahi, Tahir Çolakoğlu, Emre Ergeçen, Özgün Yavuz, René Hübner, Mona Zolfaghari Borra, Ihor Pavlov, Alpan Bek, Raşit Turan, Denizhan Koray Kesim, Serhat Tozburun, Serim Ilday, F. Ömer Ilday
In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
published pages: 639-645, ISSN: 1749-4885, DOI: 10.1038/s41566-017-0004-4
Nature Photonics 11/10 2019-06-18
2017 I. Pavlov, O. Tokel, S. Pavlova, V. Kadan, G. Makey, A. Turnali, Ö. Yavuz, F. Ö. Ilday
Femtosecond laser written waveguides deep inside silicon
published pages: 3028, ISSN: 0146-9592, DOI: 10.1364/OL.42.003028
Optics Letters 42/15 2019-06-18

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