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SENSiSOFT SIGNED

New sensor devices based on soft chemistry assisted nanostructured functional oxides on Si integrated systems

Total Cost €

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EC-Contrib. €

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Partnership

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 SENSiSOFT project word cloud

Explore the words cloud of the SENSiSOFT project. It provides you a very rough idea of what is the project "SENSiSOFT" about.

bridges    mainly    monitoring    plates    industry    hollandite    fabrication    resonators    micromachining    lamb    ing    forces    configuration    sustainable    piezoelectrics    mass    jet    ultrasound    strategies    epitaxial    nanometer    gap    soft    ink    date    1d    times    solution    generators    materials    wns    clamping    monolithic    nanorods    nanostructured    chemical    oxide    structures    unified    combined    mems    wireless    resonator    hollandites    bridging    saw    resonating    integration    sensor    integrating    network    nanowires    demands    motion    metrology    porous    sensors    size    printers    morphologies    pressure    silicon    active    wave    excellent    membranes    abundant    substrate    detection    sensisoft    innovative    nanostructuration    piezoelectric    mechanical    sensitivity    multisensor    exploited    node    answer    representing    unusual    milestone    limit    harmless    direct    everyday    perovskite    chemistry    threshold    demand    oxides    fullest    nanostructures    billion    quartz    sensitive    avoiding    films    cheap    2d    proposes    techniques    microfabrication    thin    structure    layers   

Project "SENSiSOFT" data sheet

The following table provides information about the project.

Coordinator
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS 

Organization address
address: RUE MICHEL ANGE 3
city: PARIS
postcode: 75794
website: www.cnrs.fr

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country France [FR]
 Total cost 1˙499˙360 €
 EC max contribution 1˙499˙360 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2018-STG
 Funding Scheme ERC-STG
 Starting year 2019
 Duration (year-month-day) from 2019-01-01   to  2023-12-31

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS FR (PARIS) coordinator 1˙499˙360.00

Map

 Project objective

Piezoelectrics are the active elements of many everyday applications, from ink-jet printers to ultrasound generators, representing a billion euro industry. They are the key elements of motion sensors and resonators present in any wireless network sensor (WNS) node. However, an increased production of piezoelectrics in a sustainable way is to-date a milestone. SENSiSOFT proposes to come up with materials that can provide a solution to this problem: piezoelectric materials that are abundant, cheap and harmless. The aim of this project is to produce new piezoelectric devices of nanometer size with an unusual limit for wireless mechanical sensors, using direct and combined chemical integration of quartz, perovskite and hollandites materials as nanostructured epitaxial thin films on silicon. This is a major challenge that demands bridging the gap between soft-chemistry and microfabrication techniques. Three strategies are proposed for this goal: i) Implement a soft chemistry unified, monolithic process that will allow integrating epitaxial quartz, hollandite and perovskite oxide thin layers on silicon substrate with high piezoelectric response. ii) Nanostructuration of piezoelectric epitaxial oxide thin films into controllable morphologies or nanostructures, in particular porous structure and 1D nanowires or nanorods, allowing excellent properties of oxides to be exploited to the fullest, mainly by avoiding clamping and improving its sensitivity. iii) Fabrication of nanostructured SAW resonator-based and a LAMB-WAVE multisensor for monitoring mechanical parameters (mass, forces, pressure…). We will use MEMs technology in order to be able to define resonating structures (plates, membranes, bridges…) by silicon micromachining. So, SENSiSOFT presents three innovative strategies to develop sensor devices capable to answer the metrology demand, with a detection threshold 10 to 100 times more sensitive resulting from a 1D and 2D configuration of novel piezoelectric oxides.

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The information about "SENSISOFT" are provided by the European Opendata Portal: CORDIS opendata.

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