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New sensor devices based on soft chemistry assisted nanostructured functional oxides on Si integrated systems

Total Cost €


EC-Contrib. €






 SENSiSOFT project word cloud

Explore the words cloud of the SENSiSOFT project. It provides you a very rough idea of what is the project "SENSiSOFT" about.

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Project "SENSiSOFT" data sheet

The following table provides information about the project.


Organization address
address: RUE MICHEL ANGE 3
city: PARIS
postcode: 75794

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country France [FR]
 Total cost 1˙499˙360 €
 EC max contribution 1˙499˙360 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2018-STG
 Funding Scheme ERC-STG
 Starting year 2019
 Duration (year-month-day) from 2019-01-01   to  2023-12-31


Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 


 Project objective

Piezoelectrics are the active elements of many everyday applications, from ink-jet printers to ultrasound generators, representing a billion euro industry. They are the key elements of motion sensors and resonators present in any wireless network sensor (WNS) node. However, an increased production of piezoelectrics in a sustainable way is to-date a milestone. SENSiSOFT proposes to come up with materials that can provide a solution to this problem: piezoelectric materials that are abundant, cheap and harmless. The aim of this project is to produce new piezoelectric devices of nanometer size with an unusual limit for wireless mechanical sensors, using direct and combined chemical integration of quartz, perovskite and hollandites materials as nanostructured epitaxial thin films on silicon. This is a major challenge that demands bridging the gap between soft-chemistry and microfabrication techniques. Three strategies are proposed for this goal: i) Implement a soft chemistry unified, monolithic process that will allow integrating epitaxial quartz, hollandite and perovskite oxide thin layers on silicon substrate with high piezoelectric response. ii) Nanostructuration of piezoelectric epitaxial oxide thin films into controllable morphologies or nanostructures, in particular porous structure and 1D nanowires or nanorods, allowing excellent properties of oxides to be exploited to the fullest, mainly by avoiding clamping and improving its sensitivity. iii) Fabrication of nanostructured SAW resonator-based and a LAMB-WAVE multisensor for monitoring mechanical parameters (mass, forces, pressure…). We will use MEMs technology in order to be able to define resonating structures (plates, membranes, bridges…) by silicon micromachining. So, SENSiSOFT presents three innovative strategies to develop sensor devices capable to answer the metrology demand, with a detection threshold 10 to 100 times more sensitive resulting from a 1D and 2D configuration of novel piezoelectric oxides.

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The information about "SENSISOFT" are provided by the European Opendata Portal: CORDIS opendata.

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