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Vapor deposition of crystalline porous solids

Total Cost €


EC-Contrib. €






Project "VAPORE" data sheet

The following table provides information about the project.


Organization address
address: OUDE MARKT 13
city: LEUVEN
postcode: 3000

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Belgium [BE]
 Project website
 Total cost 1˙787˙475 €
 EC max contribution 1˙787˙475 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2016-STG
 Funding Scheme ERC-STG
 Starting year 2016
 Duration (year-month-day) from 2016-12-01   to  2021-11-30


Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    KATHOLIEKE UNIVERSITEIT LEUVEN BE (LEUVEN) coordinator 1˙787˙475.00


 Project objective

Metal-organic frameworks (MOFs) are crystalline solids with highly regular pores in the nanometer range. The possibility to create a tailored nano-environment inside the MOF pores makes these materials high-potential candidates for integration with microelectronics, e.g. as sensor coatings, solid electrolytes, etc. However, current solvent-based methods for MOF film deposition, a key enabling step in device integration, are incompatible with microelectronics fabrication because of contamination and corrosion issues.

VAPORE will open up the path to integrate MOFs in microelectronics by developing a solvent-free chemical vapor deposition (CVD) route for MOF films. MOF-CVD will be the first example of vapor-phase deposition of any type of microporous crystalline network solid and marks an important milestone in processing such materials. Development of the MOF-CVD technology platform will start from a proof-of-concept case and will be supported by the following pillars: (1) Insight in the process, (2) expansion of the materials scope and (3) fine-tuning process control. The potential of MOF-CVD coatings will be illustrated in proof-of-concept sensors.

In summary, by growing porous crystalline films from the vapor phase for the first time, VAPORE implements molecular self-assembly as a scalable tool to fabricate highly controlled nanopores. In doing so, the project will enable cross-fertilization between the worlds of nanoscale chemistry and microelectronics, two previously incompatible fields.


year authors and title journal last update
List of publications.
2020 Timothée Stassin, Ivo Stassen, Nathalie Wauteraerts, Alexander John Cruz, Marianne Kräuter, Anna Maria Coclite, Dirk De Vos, Rob Ameloot
Solvent-Free Powder Synthesis and Thin Film Chemical Vapor Deposition of a Zinc Bipyridyl-Triazolate Framework
published pages: 71-74, ISSN: 1434-1948, DOI: 10.1002/ejic.201901051
European Journal of Inorganic Chemistry 2020/1 2020-02-20
2019 Mikhail Krishtab, Ivo Stassen, Timothée Stassin, Alexander John Cruz, Oguzhan Orkut Okudur, Silvia Armini, Chris Wilson, Stefan De Gendt, Rob Ameloot
Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics
published pages: , ISSN: 2041-1723, DOI: 10.1038/s41467-019-11703-x
Nature Communications 10/1 2020-02-20
2019 João Marreiros, Lenz Van Dommelen, Guillaume Fleury, Rodrigo de Oliveira-Silva, Timothée Stassin, Paul Iacomi, Shuhei Furukawa, Dimitrios Sakellariou, Philip L. Llewellyn, Maarten Roeffaers, Rob Ameloot
Vapor-Phase Linker Exchange of the Metal-Organic Framework ZIF-8: A Solvent-Free Approach to Post-synthetic Modification
published pages: 18471-18475, ISSN: 1433-7851, DOI: 10.1002/anie.201912088
Angewandte Chemie International Edition 58/51 2020-02-20
2019 Alexander John Cruz, Ivo Stassen, Mikhail Krishtab, Kristof Marcoen, Timothée Stassin, Sabina Rodríguez-Hermida, Joan Teyssandier, Sven Pletincx, Rhea Verbeke, Víctor Rubio-Giménez, Sergio Tatay, Carlos Martí-Gastaldo, Johan Meersschaut, Philippe M. Vereecken, Steven De Feyter, Tom Hauffman, Rob Ameloot
Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films
published pages: 9462-9471, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.9b03435
Chemistry of Materials 31/22 2020-02-20
2020 Timothée Stassin, Ivo Stassen, João Marreiros, Alexander John Cruz, Rhea Verbeke, Min Tu, Helge Reinsch, Marcel Dickmann, Werner Egger, Ivo F. J. Vankelecom, Dirk E. De Vos, Rob Ameloot
Solvent-free powder synthesis and MOF-CVD thin films of the large-pore metal-organic framework MAF-6
published pages: tbd, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.9b03807
Chemistry of Materials tbd 2020-02-20
2019 Min Tu, Helge Reinsch, Sabina Rodríguez-Hermida, Rhea Verbeke, Timothée Stassin, Werner Egger, Marcel Dickmann, Bjorn Dieu, Johan Hofkens, Ivo F. J. Vankelecom, Norbert Stock, Rob Ameloot
Reversible Optical Writing and Data Storage in an Anthracene-Loaded Metal-Organic Framework
published pages: 2423-2427, ISSN: 1433-7851, DOI: 10.1002/anie.201813996
Angewandte Chemie International Edition 58/8 2019-08-29
2019 Joao Marreiros, Chiara Caratelli, Julianna Hajek, Andraž Krajnc, Guillaume Fleury, Bart Bueken, Dirk E. De Vos, Gregor Mali, Maarten B. J. Roeffaers, Veronique Van Speybroeck, Rob Ameloot
Active Role of Methanol in Post-Synthetic Linker Exchange in the Metal–Organic Framework UiO-66
published pages: 1359-1369, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.8b04734
Chemistry of Materials 31/4 2019-08-29
2019 Timothée Stassin, Sabina Rodríguez-Hemida, Benedikt Schrode, Alexander John Cruz, Francesco Carraro, Dmitry Kravchenko, Vincent Creemers, Ivo Stassen, Tom Hauffman, Dirk E. De Vos, Paolo Falcaro, Roland Resel, Rob Ameloot
Vapour-phase deposition of oriented copper dicarboxylate metal-organic framework thin films
published pages: , ISSN: 1359-7345, DOI: 10.1039/c9cc05161a
Chemical Communications 2019-08-29
2017 Ivo Stassen, Nicholas Burtch, Alec Talin, Paolo Falcaro, Mark Allendorf, Rob Ameloot
An updated roadmap for the integration of metal–organic frameworks with electronic devices and chemical sensors
published pages: 3185-3241, ISSN: 0306-0012, DOI: 10.1039/C7CS00122C
Chemical Society Reviews 46/11 2019-06-13

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