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PIN3S SIGNED

Pilot Integration of 3nm Semiconducter technology

Total Cost €

EC-Contrib. €

Partnership

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PIN3S project word cloud

Explore the words cloud of the PIN3S project. It provides you a very rough idea of what is the project "PIN3S" about.

semiconductor metrology mask ecsel 3d builds lithography class node institutes industry migrate miniaturization ahead solutions 3nm twente euv nova manufacturing covers tu 2018 developers strategic technologies heidelberg world 15 ju more care pin3s delft health materials manufacturers supplying realizing approximately germany suppliers involvement leadership security structures zeiss fisher asml performance tools nanoscale university memory universities ambition cooperation deal realize logic overlay efficient societal form maintaining electronics size introduction energy safety ic communication bases complemented pilot thermo section power fraunhofer network mobility evaluation components repair netherland plan kti innovations volume creation integration imec hospital annual defects

Project "PIN3S" data sheet

The following table provides information about the project.

Coordinator	ASML NETHERLANDS B.V. Organization address address: DE RUN 6501 city: VELDHOVEN postcode: 5504DR website: www.asml.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.
Coordinator Country	Netherlands [NL]
Total cost	119˙581˙291 €
EC max contribution	26˙787˙918 € (22%)
Programme	1. H2020-EU.2.1.1.7. (ECSEL)
Code Call	H2020-ECSEL-2018-1-IA-two-stage
Funding Scheme	ECSEL-IA
Starting year	2019
Duration (year-month-day)	from 2019-10-01 to 2022-09-30

Partnership

Take a look of project's partnership.

#	participants	country	role	EC contrib. [€]
1	ASML NETHERLANDS B.V. ASML NETHERLANDS B.V. Organization address address: DE RUN 6501 city: VELDHOVEN postcode: 5504DR website: www.asml.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (VELDHOVEN)	coordinator	4˙500˙000.00
2	CARL ZEISS SMT GMBH CARL ZEISS SMT GMBH Organization address address: RUDOLF EBER STRASSE 2 city: OBERKOCHEN postcode: 73447 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (OBERKOCHEN)	participant	5˙913˙176.00
3	INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM Organization address address: KAPELDREEF 75 city: LEUVEN postcode: 3001 website: www.imec.be contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	participant	5˙734˙108.00
4	BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO Organization address address: WALDKRAIBURGER STRASSE 5 city: BERLIN postcode: 12347 website: www.berlinerglas.de contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (BERLIN)	participant	1˙422˙687.00
5	KLA-Tencor MIE GmbH KLA-Tencor MIE GmbH Organization address address: Kubacher Weg 4 city: Weilburg postcode: 35781 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (Weilburg)	participant	1˙164˙750.00
6	APPLIED MATERIALS ISRAEL LTD APPLIED MATERIALS ISRAEL LTD Organization address address: OPPENHEIMER STREET 9 city: REHOVOT postcode: 76705 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	IL (REHOVOT)	participant	984˙188.00
7	UNIVERSITEIT TWENTE UNIVERSITEIT TWENTE Organization address address: DRIENERLOLAAN 5 city: ENSCHEDE postcode: 7522 NB website: www.utwente.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (ENSCHEDE)	participant	975˙166.00
8	FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. Organization address address: HANSASTRASSE 27C city: MUNCHEN postcode: 80686 website: www.fraunhofer.de contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (MUNCHEN)	participant	903˙068.00
9	PRODRIVE TECHNOLOGIES BV PRODRIVE TECHNOLOGIES BV Organization address address: SCIENCE PARK EINDHOVEN 5501 city: SON postcode: 5692 EM website: www.prodrive.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (SON)	participant	828˙750.00
10	NOVA MEASURING INSTRUMENTS LTD NOVA MEASURING INSTRUMENTS LTD Organization address address: WEIZMANN SCIENCE PARK BUILDING 22 city: REHOVOT postcode: 76100 website: www.nova.co.il contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	IL (REHOVOT)	participant	796˙478.00
11	SIOUX CCM BV SIOUX CCM BV Organization address address: DE PINCKART 24 city: NUENEN postcode: 5674 CC website: www.ccm.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (NUENEN)	participant	703˙930.00
12	FEI ELECTRON OPTICS BV FEI ELECTRON OPTICS BV Organization address address: ACHTSEWEG NOORD GEBOUW AAE 5 city: EINDHOVEN postcode: 5651 GG website: www.fei.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (EINDHOVEN)	participant	690˙250.00
13	KLA-TENCOR CORPORATION (ISRAEL) KLA-TENCOR CORPORATION (ISRAEL) Organization address address: HATIKSHORET ST. city: MIGDAL HAEMEK postcode: 23100 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	IL (MIGDAL HAEMEK)	participant	368˙550.00
14	ION BEAM SERVICES ION BEAM SERVICES Organization address address: RUE GASTON IMBERT PROLONGEE city: ROUSSET postcode: 13790 website: www.ion-beam-services.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (ROUSSET)	participant	265˙795.00
15	COVENTOR SARL COVENTOR SARL Organization address address: AVENUE DU QUEBEC 3 city: VILLEBON SUR YVETTE postcode: 91140 website: www.coventor.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (VILLEBON SUR YVETTE)	participant	259˙696.00
16	TECHNISCHE UNIVERSITEIT DELFT TECHNISCHE UNIVERSITEIT DELFT Organization address address: STEVINWEG 1 city: DELFT postcode: 2628 CN website: www.tudelft.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (DELFT)	participant	241˙652.00
17	VDL ETG TECHNOLOGY & DEVELOPMENT BV VDL ETG TECHNOLOGY & DEVELOPMENT BV Organization address address: SCHAKEL 22 city: EINDHOVEN postcode: 5651 GH website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (EINDHOVEN)	participant	233˙870.00
18	PFEIFFER VACUUM PFEIFFER VACUUM Organization address address: 98 AVENUE DE BROGNY city: ANNECY postcode: 74000 website: www.adixen.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (ANNECY)	participant	196˙909.00
19	SCIA SYSTEMS GMBH SCIA SYSTEMS GMBH Organization address address: ANNABERGER STRASSE 240 city: CHEMNITZ postcode: 9125 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (CHEMNITZ)	participant	157˙644.00
20	SOLMATES BV SOLMATES BV Organization address address: AUKE VLEERSTRAAT 3 city: ENSCHEDE postcode: 7521 PE website: www.solmates.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (ENSCHEDE)	participant	151˙437.00
21	APPLIED MATERIALS BELGIUM APPLIED MATERIALS BELGIUM Organization address address: KAPELDREEF 75 Bus C1 city: LEUVEN postcode: 3001 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	participant	116˙875.00
22	RECIF TECHNOLOGIES RECIF TECHNOLOGIES Organization address address: rue des briquetiers 9 city: Blagnac postcode: 31700 website: www.reciftech.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (Blagnac)	participant	99˙108.00
23	REDEN B.V. REDEN B.V. Organization address address: F HAZEMEIJERSTRAAT 800 city: HENGELO OV postcode: 7555 RJ website: www.reden.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (HENGELO OV)	participant	79˙827.00
24	UNIVERSITATEA POLITEHNICA DIN BUCURESTI UNIVERSITATEA POLITEHNICA DIN BUCURESTI Organization address address: SPLAIUL INDEPENDENTEI 313 SECT 6 city: BUCHAREST postcode: 60042 website: http://www.pub.ro contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	RO (BUCHAREST)	participant	0.00

Map

Project objective

The overall objective of the PIn3S project is to realize Pilot Integration of 3nm Semiconductor technology. This covers Process Integration, creation of Lithography Equipment, EUV Mask Repair Equipment and Metrology tools capable to deal with 3D structures, defects analysis, overlay and feature size evaluation. Each of these objectives will be achieved by cooperation between key European equipment developers like; ASML, Zeiss, Thermo Fisher, Applied Materials, Nova, KTI involved with their suppliers, involvement of a strong knowledge network based on Universities of Germany, Heidelberg University Hospital, and the Netherland, TU Delft and the University of Twente, complemented with key Technology Institutes such as imec and Fraunhofer. The project addresses Section 15 “Electronics Components & Systems Process Technology, Equipment, Materials and Manufacturing”, Major Challenge 4 “Maintaining world leadership in Semiconductor Equipment, Materials and Manufacturing solutions” and Major Challenge 1 “Developing advanced logic and memory technology for nanoscale integration and application-driven performance” of the ECSEL JU Annual Work Plan 2018. As set out in the Multi Annual Strategic Plan 2018, PIn3S addresses the ambition for the European Equipment & Manufacturing industry for advanced semiconductor technologies to lead the world in miniaturization by supplying new equipment and materials approximately two years ahead of introduction of volume production of advanced semiconductor manufacturers. With the results of the Pin3S project the consortium builds on realizing IC manufacturers to migrate to the 3nm Technology node which enables a class of new products which have more functionality, more performance and are more power efficient. As such it will form the bases for innovations yet to come enabling solutions that address the societal challenges in communication, mobility, health care, security, energy and safety & security.

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The information about "PIN3S" are provided by the European Opendata Portal: CORDIS opendata.