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Smart MEMs Piezo based energy Harvesting with Integrated Supercapacitor and packaging

Total Cost €


EC-Contrib. €






 smart-MEMPHIS project word cloud

Explore the words cloud of the smart-MEMPHIS project. It provides you a very rough idea of what is the project "smart-MEMPHIS" about.

invasive    wsn    energy    applicability    leakage    wireless    time    technologies    power    3d    treatments    reviews    shift    consisting    reliability    patient    size    extremely    composite    zirconate    pipes    variations    piezo    materials    bridges    demonstrated    supercapacitor    enabled    chain    harvested    paradigm    shm    compatible    powering    demand    storing    mems    pacemakers    innovative    manufacture    flat    small    sensor    complementing    health    nano    material    surgical    nodes    medical    harvesters    cracks    corrosion    costly    monitoring    pacemaker    harvester    manufacturability    networks    miniaturized    demanding    energies    frequency    structure    carbon    functional    device    stringent    frequencies    memphis    minimally    demonstrator    integrate    2nd    micro    ultra    asic    harvesting    aircraft    inside    vibrational    heterogeneously    detection    solving    cardiac    performance    rails    acoustic    panel    smart    nanomaterials    integration    structures    heart    implanted    arise    leadless    axis    accelerate    self    efficient    burdensome    survey    bio    verified    packaging    titanate    beats    wings    supply    operations    autonomous   

Project "smart-MEMPHIS" data sheet

The following table provides information about the project.


Organization address
address: BRUTTOVAGEN 1
postcode: 175 26

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Sweden [SE]
 Project website
 Total cost 8˙222˙065 €
 EC max contribution 8˙222˙065 € (100%)
 Programme 1. H2020-EU. (A new generation of components and systems: Engineering of advanced embedded and energy and resource efficient components and systems)
 Code Call H2020-ICT-2014-1
 Funding Scheme RIA
 Starting year 2014
 Duration (year-month-day) from 2014-12-15   to  2018-12-14


Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    SILEX MICROSYSTEMS AB SE (JARVALLA) coordinator 1˙463˙000.00
2    VERMON SA FR (TOURS CEDEX 1) participant 1˙013˙418.00
5    CAIRDAC FR (ANTONY) participant 930˙173.00
6    LINKOPINGS UNIVERSITET SE (LINKOPING) participant 796˙786.00
7    aixACCT Systems GmbH DE (AACHEN) participant 662˙750.00
8    RISE ACREO AB SE (KISTA) participant 618˙373.00
9    SORIN CRM SAS FR (CLAMART) participant 372˙232.00
10    SPINVERSE OY FI (ESPOO) participant 259˙788.00
11    SPINVERSE AB SE (STOCKHOLM) participant 45˙000.00


 Project objective

Smart-MEMPHIS project addresses the increasing demand for low-cost, energy-efficient autonomous systems by focusing on the main challenge for all smart devices - self-powering. The project aims to design, manufacture and test a miniaturized autonomous energy supply based on harvesting vibrational energy with piezo-MEMS energy harvesters. The project will integrate several multi-functional technologies and nanomaterials; lead-zirconate-titanate materials in MEMS-based multi-axis energy harvester, an ultra-low-power ASIC to manage the variations of the frequency and harvested power, a miniaturized carbon-nano material based energy storing supercapacitor, all heterogeneously integrated with new innovative flat panel packaging technologies for cost effective 3D integration verified through manufacturability reviews.

The performance of the system will be demonstrated in two demanding applications: leadless bio-compatible cardiac pacemaker and wireless sensor networks (WSN) for structure health monitoring (SHM). For the pacemaker, a smart energy autonomous system will accelerate the paradigm shift from costly, burdensome surgical treatments to cost-effective and patient-friendly minimally invasive operations enabled by leadless pacemakers capable of harvesting energy from the heart beats. The key challenges for the energy harvesting arise from the extremely stringent reliability requirements, the low vibrational energies and frequencies and the small size required for a device implanted inside a heart.

With the 2nd demonstrator the consortium consisting of multi-functional value chain will show a wider applicability for the technologies complementing the medical application. A WSN with acoustic sensor nodes will be demonstrated in SHM applications. SHM enables real-time monitoring of complex structures e.g. survey and detection of micro-cracks for example in composite aircraft wings, bridges or rails, or detection of corrosion or leakage in pipes solving.


List of deliverables.
Project website setup Websites, patent fillings, videos etc. 2020-01-24 09:18:49

Take a look to the deliverables list in detail:  detailed list of smart-MEMPHIS deliverables.


year authors and title journal last update
List of publications.
2015 V Kuzmenko, A M Saleem, A Bhaskar, H Staaf, V Desmaris, P Enoksson
Hierarchical cellulose-derived carbon nanocomposites for electrostatic energy storage
published pages: 12062, ISSN: 1742-6588, DOI: 10.1088/1742-6596/660/1/012062
Journal of Physics: Conference Series 660 2020-01-24
2016 Pontus Johannisson, Fredrik Ohlsson and Cristina Rusu
Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams
published pages: , ISSN: , DOI:
ournal of Physics: Conference Series, Volume 773, conference 1 2020-01-24
2018 Fredrik Ohlsson, Pontus Johannisson, Cristina Rusu
Shape effects in doubly clamped bridge structures at large deflections
published pages: 12109, ISSN: 1742-6588, DOI: 10.1088/1742-6596/1052/1/012109
Journal of Physics: Conference Series 1052 2020-01-24
2018 Pontus Johannisson, Fredrik Ohlsson, Cristina Rusu
Impact-driven up-conversion in piezoelectric MEMS energy harvesters with pulsed excitation
published pages: 12106, ISSN: 1742-6588, DOI: 10.1088/1742-6596/1052/1/012106
Journal of Physics: Conference Series 1052 2020-01-24
2018 A D Smith, Q Li, A Anderson, A Vyas, V Kuzmenko, M Haque, L G H Staaf, P Lundgren, P Enoksson
Toward CMOS compatible wafer-scale fabrication of carbon-based microsupercapacitors for IoT
published pages: 12143, ISSN: 1742-6588, DOI: 10.1088/1742-6596/1052/1/012143
Journal of Physics: Conference Series 1052 2020-01-24
2018 Agin Vyas, Henrik Staaf, Cristina Rusu, Thorbjörn Ebefors, Jessica Liljeholm, Anderson Smith, Per Lundgren, Peter Enoksson
A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters
published pages: 252, ISSN: 2072-666X, DOI: 10.3390/mi9050252
Micromachines 9/5 2020-01-24
2017 Volodymyr Kuzmenko, Nan Wang, Mazharul Haque, Olga Naboka, Mattias Flygare, Krister Svensson, Paul Gatenholm, Johan Liu, Peter Enoksson
Cellulose-derived carbon nanofibers/graphene composite electrodes for powerful compact supercapacitors
published pages: 45968-45977, ISSN: 2046-2069, DOI: 10.1039/c7ra07533b
RSC Adv. 7/73 2020-01-24
2017 Qi Li, Anderson D. Smith, Mazharul Haque, Agin Vyas, Volodymyr Kuzmenko, Per Lundgren, Peter Enoksson
Graphite paper / carbon nanotube composite: a potential supercapacitor electrode for powering microsystem technology
published pages: 12014, ISSN: 1742-6588, DOI: 10.1088/1742-6596/922/1/012014
Journal of Physics: Conference Series 922 2020-01-24
2015 Volodymyr Kuzmenko, Olga Naboka, Mazharul Haque, Henrik Staaf, Gert Göransson, Paul Gatenholm, Peter Enoksson
Sustainable carbon nanofibers/nanotubes composites from cellulose as electrodes for supercapacitors
published pages: 1490-1496, ISSN: 0360-5442, DOI: 10.1016/
Energy 90 2020-01-24
2018 S Larsson, P Johannisson, D Kolev, F Ohlsson, S Nik, J Liljeholm, T Ebefors, C Rusu
Simple method for quality factor estimation in resonating MEMS structures
published pages: 12100, ISSN: 1742-6588, DOI: 10.1088/1742-6596/1052/1/012100
Journal of Physics: Conference Series 1052 2020-01-24
2018 L.G.H Staaf, E. Köhler, A. D. Smith, P.D Folkow, P. Enoksson
Verification of Self-Tuning 4DOF Piezoelectric Energy Harvester with Enhanced Bandwidth
published pages: 12095, ISSN: 1742-6588, DOI: 10.1088/1742-6596/1052/1/012095
Journal of Physics: Conference Series 1052 2020-01-24
2018 P. Ã…gren, N. Svedin, T. Ebefors, T. Schmitz-Kempen, R. Kessels, S. Tiedke
Reliability investigation of production thin-film PZT
published pages: , ISSN: , DOI:
2018 PiezoMEMS Workshop 2020-01-24
2016 Dai Zhang, Atila Alvandpour
A 12.5-ENOB 10-kS/s Redundant SAR ADC in 65-nm CMOS
published pages: 244-248, ISSN: 1549-7747, DOI: 10.1109/tcsii.2015.2482618
IEEE Transactions on Circuits and Systems II: Express Briefs 63/3 2020-01-24
2016 Kairang Chen, Prakash Harikumar, Atila Alvandpour
Design of a 12.8 ENOB, 1 kS/s pipelined SAR ADC in 0.35-μm CMOS
published pages: 87-98, ISSN: 0925-1030, DOI: 10.1007/s10470-015-0648-2
Analog Integrated Circuits and Signal Processing 86/1 2020-01-24
2017 Amin M. Saleem
Coin-cell Supercapacitors Based on CVD Grown and Vertically Aligned Carbon Nanofibers (VACNFs)
published pages: 6653-6661, ISSN: 1452-3981, DOI: 10.20964/2017.07.46
International Journal of Electrochemical Science 2020-01-24
2017 Mazharul Haque, Qi Li, Volodymyr Kuzmenko, Anderson D. Smith, Peter Enoksson
Ionic liquid electrolyte for supercapacitor with high temperature compatibility
published pages: 12011, ISSN: 1742-6588, DOI: 10.1088/1742-6596/922/1/012011
Journal of Physics: Conference Series 922 2020-01-24
2017 Qi Li, Mazharul Haque, Volodymyr Kuzmenko, Namrata Ramani, Per Lundgren, Anderson D. Smith, Peter Enoksson
Redox enhanced energy storage in an aqueous high-voltage electrochemical capacitor with a potassium bromide electrolyte
published pages: 219-228, ISSN: 0378-7753, DOI: 10.1016/j.jpowsour.2017.02.082
Journal of Power Sources 348 2020-01-24
2017 Kairang Chen, Atila Alvandpour
A pipelined SAR ADC with gain-stage based on capacitive charge pump
published pages: 43-53, ISSN: 0925-1030, DOI: 10.1007/s10470-016-0872-4
Analog Integrated Circuits and Signal Processing 90/1 2020-01-24
2016 Prakash Harikumar, J. Jacob Wikner, Atila Alvandpour
A 0.4-V Subnanowatt 8-Bit 1-kS/s SAR ADC in 65-nm CMOS for Wireless Sensor Applications
published pages: 743-747, ISSN: 1549-7747, DOI: 10.1109/TCSII.2016.2531099
IEEE Transactions on Circuits and Systems II: Express Briefs 63/8 2020-01-24
2018 E Kohler, P Johannisson, D Kolev, F Ohlsson, P Agren, J Liljeholm, P Enoksson and C Rusu
MEMS meander harvester with tungsten proof-mass
published pages: , ISSN: , DOI:
Power MEMS 2018 2020-01-24
2018 Elof Köhler
Energy Harvesting and Energy Storage for Wireless and Less-Wired Sensors in Harsh Environment
published pages: , ISSN: , DOI:
Chalmers University Technical Report 2020-01-24
2018 Henrik Staaf
Conjoined piezoelectric harvesters and carbon supercapacitors for powering intelligent wireless sensors
published pages: , ISSN: , DOI:
PhD Defense 2020-01-24
2018 Mazharul Haque, Qi Li, Anderson D. Smith, Volodymyr Kuzmenko, Elof Köhler, Per Lundgren, Peter Enoksson
Thermal influence on the electrochemical behavior of a supercapacitor containing an ionic liquid electrolyte
published pages: 249-260, ISSN: 0013-4686, DOI: 10.1016/j.electacta.2018.01.029
Electrochimica Acta 263 2020-01-24
2019 Qi Li, Shuangxi Sun, Anderson D. Smith, Per Lundgren, Yifeng Fu, Peng Su, Tao Xu, Lilei Ye, Litao Sun, Johan Liu, Peter Enoksson
Compact and low loss electrochemical capacitors using a graphite / carbon nanotube hybrid material for miniaturized systems
published pages: 374-383, ISSN: 0378-7753, DOI: 10.1016/j.jpowsour.2018.11.052
Journal of Power Sources 412 2020-01-24
2016 T. Hoang, G. Ferin, B. Rosinski, C. Bantignies, H. Le Khanh, A. Nguyen-Dinh, G. Poulin-Vittrant, F. Levassort, and M. Bavencoffe
Characterization of a thin piezoelectric material before integration into a cantilever-based mechanical energy harvester
published pages: , ISSN: , DOI:
2016 IEEE International Ultrasonics Symposium (IUS) 2020-01-24

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