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MAGIC SIGNED

Metal Assisted chemical etching of Gratings for X-ray InterferometriC systems

Total Cost €

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EC-Contrib. €

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Partnership

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 MAGIC project word cloud

Explore the words cloud of the MAGIC project. It provides you a very rough idea of what is the project "MAGIC" about.

medical    clinical    sensitive    technique    breast    unconventional    favorable    area    bottleneck    preventing    silicon    idea    fundamentals    fabrication    mammography    physical    phase    showed    gratings    measuring    vitro    dark    density    material    chemical    local    radiological    imaging    limits    performances    starting    magic    nbsp    angle    mastectomies    reader    revolutionize    advantages    relevance    context    first    mace    power    subtle    serving    phasex    possibility    potentially    scattering    deeply    seminal    energy    market    techniques    quicker    innovative    exceptional    competitive    explored    energies    fulfil    basis    etching    assisted    intrinsically    metal    ratio    fov    view    conventional    differences    ray    wet    erc    interferometry    diffraction    poc    translation    tested    small    investigation    clinic    price    grating    additional    contrast    microscopic    specimen    quality    310005    electron    grant    establishing    mammographic    world    detecting    fluctuations    keep   

Project "MAGIC" data sheet

The following table provides information about the project.

Coordinator
EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH 

Organization address
address: Raemistrasse 101
city: ZUERICH
postcode: 8092
website: https://www.ethz.ch/de.html

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Switzerland [CH]
 Total cost 149˙997 €
 EC max contribution 149˙997 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2016-PoC
 Funding Scheme ERC-POC
 Starting year 2016
 Duration (year-month-day) from 2016-11-01   to  2018-04-30

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH CH (ZUERICH) coordinator 136˙197.00
2    PAUL SCHERRER INSTITUT CH (VILLIGEN PSI) participant 13˙800.00

Map

 Project objective

Phase contrast and scattering-based (dark-field) X-ray imaging can potentially revolutionize the radiological approach to medical imaging because they are intrinsically capable of detecting subtle differences in the electron density of a material and of measuring the effective integrated local small-angle scattering power generated by the microscopic density fluctuations in the specimen. Within the context of the ERC-Starting Grant PhaseX (310005) we deeply investigated and further developed gratings- based interferometry, a rapidly establishing phase sensitive technique. In particular, we generated seminal work towards the translation of phase contrast imaging into clinic with the world-wide first in-vitro phase-contrast mammographic investigation of whole breast mastectomies and the first reader study investigating potential clinical relevance of phase-contrast mammography. Grating fabrication is the main bottleneck so far preventing grating-based X-ray phase-contrast interferometry from being applied at high energies and large Field of View (FOV). With PhaseX, we addressed the fundamentals of grating fabrication in order to deliver high-quality diffraction gratings with high-aspect ratio. In particular, we explored unconventional fabrication techniques in order to go beyond the physical limits of the conventional approaches and we developed the idea of innovative technology at the basis of this ERC-PoC project (MAGIC). Among the tested wet etching techniques, Metal Assisted Chemical Etching (MACE) showed exceptional performances for fabrication of large area silicon gratings with high aspect ratio. The main idea of MAGIC is to use MACE for grating fabrication with characteristics that fulfil high energy and large FOV applications: we target the same quality with a competitive price in order to keep the ratio quality/cost in a favorable range with additional advantages of large FOV and possibility of serving a large market on a quicker way. 

 Publications

year authors and title journal last update
List of publications.
2017 L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
published pages: 6-10, ISSN: 0167-9317, DOI: 10.1016/j.mee.2016.12.032
Microelectronic Engineering 176 2019-06-12
2017 L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni
Effect of isopropanol on gold assisted chemical etching of silicon microstructures
published pages: 59-65, ISSN: 0167-9317, DOI: 10.1016/j.mee.2017.02.008
Microelectronic Engineering 177 2019-06-12
2017 Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni
High-aspect ratio silicon structures by displacement Talbot lithography and Bosch etching
published pages: 101460L, ISSN: , DOI: 10.1117/12.2258007
Advances in Patterning Materials and Processes XXXIV 2019-06-12
2018 Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs
Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium
published pages: 19-24, ISSN: 0167-9317, DOI: 10.1016/j.mee.2018.01.027
Microelectronic Engineering 192 2019-06-12
2017 Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs
Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication
published pages: 06G302, ISSN: 2166-2754, DOI: 10.1116/1.4991807
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 35/6 2019-06-12

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