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MAGIC SIGNED

Metal Assisted chemical etching of Gratings for X-ray InterferometriC systems

Total Cost €

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EC-Contrib. €

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Partnership

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 MAGIC project word cloud

Explore the words cloud of the MAGIC project. It provides you a very rough idea of what is the project "MAGIC" about.

competitive    translation    limits    etching    mammographic    additional    specimen    differences    mammography    phase    establishing    energies    microscopic    sensitive    exceptional    context    deeply    ratio    erc    assisted    ray    fluctuations    fov    grating    performances    revolutionize    basis    breast    material    bottleneck    investigation    interferometry    electron    market    world    potentially    seminal    showed    quality    tested    contrast    relevance    physical    area    advantages    first    power    idea    radiological    subtle    nbsp    fabrication    conventional    technique    preventing    medical    price    clinic    small    reader    energy    density    starting    detecting    unconventional    possibility    techniques    measuring    metal    fulfil    intrinsically    dark    phasex    310005    grant    imaging    view    angle    poc    favorable    local    diffraction    scattering    keep    mastectomies    explored    clinical    gratings    magic    innovative    mace    quicker    wet    silicon    fundamentals    vitro    chemical    serving   

Project "MAGIC" data sheet

The following table provides information about the project.

Coordinator
EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH 

Organization address
address: Raemistrasse 101
city: ZUERICH
postcode: 8092
website: https://www.ethz.ch/de.html

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Switzerland [CH]
 Total cost 149˙997 €
 EC max contribution 149˙997 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2016-PoC
 Funding Scheme ERC-POC
 Starting year 2016
 Duration (year-month-day) from 2016-11-01   to  2018-04-30

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH CH (ZUERICH) coordinator 136˙197.00
2    PAUL SCHERRER INSTITUT CH (VILLIGEN PSI) participant 13˙800.00

Map

 Project objective

Phase contrast and scattering-based (dark-field) X-ray imaging can potentially revolutionize the radiological approach to medical imaging because they are intrinsically capable of detecting subtle differences in the electron density of a material and of measuring the effective integrated local small-angle scattering power generated by the microscopic density fluctuations in the specimen. Within the context of the ERC-Starting Grant PhaseX (310005) we deeply investigated and further developed gratings- based interferometry, a rapidly establishing phase sensitive technique. In particular, we generated seminal work towards the translation of phase contrast imaging into clinic with the world-wide first in-vitro phase-contrast mammographic investigation of whole breast mastectomies and the first reader study investigating potential clinical relevance of phase-contrast mammography. Grating fabrication is the main bottleneck so far preventing grating-based X-ray phase-contrast interferometry from being applied at high energies and large Field of View (FOV). With PhaseX, we addressed the fundamentals of grating fabrication in order to deliver high-quality diffraction gratings with high-aspect ratio. In particular, we explored unconventional fabrication techniques in order to go beyond the physical limits of the conventional approaches and we developed the idea of innovative technology at the basis of this ERC-PoC project (MAGIC). Among the tested wet etching techniques, Metal Assisted Chemical Etching (MACE) showed exceptional performances for fabrication of large area silicon gratings with high aspect ratio. The main idea of MAGIC is to use MACE for grating fabrication with characteristics that fulfil high energy and large FOV applications: we target the same quality with a competitive price in order to keep the ratio quality/cost in a favorable range with additional advantages of large FOV and possibility of serving a large market on a quicker way. 

 Publications

year authors and title journal last update
List of publications.
2017 L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
published pages: 6-10, ISSN: 0167-9317, DOI: 10.1016/j.mee.2016.12.032
Microelectronic Engineering 176 2019-06-12
2017 L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni
Effect of isopropanol on gold assisted chemical etching of silicon microstructures
published pages: 59-65, ISSN: 0167-9317, DOI: 10.1016/j.mee.2017.02.008
Microelectronic Engineering 177 2019-06-12
2017 Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni
High-aspect ratio silicon structures by displacement Talbot lithography and Bosch etching
published pages: 101460L, ISSN: , DOI: 10.1117/12.2258007
Advances in Patterning Materials and Processes XXXIV 2019-06-12
2018 Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs
Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium
published pages: 19-24, ISSN: 0167-9317, DOI: 10.1016/j.mee.2018.01.027
Microelectronic Engineering 192 2019-06-12
2017 Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs
Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication
published pages: 06G302, ISSN: 2166-2754, DOI: 10.1116/1.4991807
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 35/6 2019-06-12

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