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Metal Assisted chemical etching of Gratings for X-ray InterferometriC systems

Total Cost €


EC-Contrib. €






 MAGIC project word cloud

Explore the words cloud of the MAGIC project. It provides you a very rough idea of what is the project "MAGIC" about.

magic    innovative    metal    advantages    investigation    reader    clinical    wet    fabrication    seminal    silicon    competitive    deeply    gratings    showed    medical    establishing    revolutionize    possibility    fulfil    310005    favorable    differences    basis    idea    mace    unconventional    first    quality    world    preventing    breast    tested    diffraction    limits    relevance    assisted    view    technique    grant    starting    phase    density    etching    performances    market    ray    keep    clinic    potentially    explored    price    fluctuations    ratio    power    erc    phasex    bottleneck    dark    microscopic    radiological    sensitive    subtle    nbsp    mastectomies    fov    mammography    interferometry    scattering    detecting    context    electron    fundamentals    specimen    angle    imaging    contrast    local    exceptional    chemical    vitro    poc    area    measuring    energy    techniques    conventional    intrinsically    small    physical    additional    serving    grating    quicker    translation    material    mammographic    energies   

Project "MAGIC" data sheet

The following table provides information about the project.


Organization address
address: Raemistrasse 101
postcode: 8092

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Switzerland [CH]
 Total cost 149˙997 €
 EC max contribution 149˙997 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2016-PoC
 Funding Scheme ERC-POC
 Starting year 2016
 Duration (year-month-day) from 2016-11-01   to  2018-04-30


Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
2    PAUL SCHERRER INSTITUT CH (VILLIGEN PSI) participant 13˙800.00


 Project objective

Phase contrast and scattering-based (dark-field) X-ray imaging can potentially revolutionize the radiological approach to medical imaging because they are intrinsically capable of detecting subtle differences in the electron density of a material and of measuring the effective integrated local small-angle scattering power generated by the microscopic density fluctuations in the specimen. Within the context of the ERC-Starting Grant PhaseX (310005) we deeply investigated and further developed gratings- based interferometry, a rapidly establishing phase sensitive technique. In particular, we generated seminal work towards the translation of phase contrast imaging into clinic with the world-wide first in-vitro phase-contrast mammographic investigation of whole breast mastectomies and the first reader study investigating potential clinical relevance of phase-contrast mammography. Grating fabrication is the main bottleneck so far preventing grating-based X-ray phase-contrast interferometry from being applied at high energies and large Field of View (FOV). With PhaseX, we addressed the fundamentals of grating fabrication in order to deliver high-quality diffraction gratings with high-aspect ratio. In particular, we explored unconventional fabrication techniques in order to go beyond the physical limits of the conventional approaches and we developed the idea of innovative technology at the basis of this ERC-PoC project (MAGIC). Among the tested wet etching techniques, Metal Assisted Chemical Etching (MACE) showed exceptional performances for fabrication of large area silicon gratings with high aspect ratio. The main idea of MAGIC is to use MACE for grating fabrication with characteristics that fulfil high energy and large FOV applications: we target the same quality with a competitive price in order to keep the ratio quality/cost in a favorable range with additional advantages of large FOV and possibility of serving a large market on a quicker way. 


year authors and title journal last update
List of publications.
2017 L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
published pages: 6-10, ISSN: 0167-9317, DOI: 10.1016/j.mee.2016.12.032
Microelectronic Engineering 176 2019-06-12
2017 L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni
Effect of isopropanol on gold assisted chemical etching of silicon microstructures
published pages: 59-65, ISSN: 0167-9317, DOI: 10.1016/j.mee.2017.02.008
Microelectronic Engineering 177 2019-06-12
2017 Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni
High-aspect ratio silicon structures by displacement Talbot lithography and Bosch etching
published pages: 101460L, ISSN: , DOI: 10.1117/12.2258007
Advances in Patterning Materials and Processes XXXIV 2019-06-12
2018 Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs
Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium
published pages: 19-24, ISSN: 0167-9317, DOI: 10.1016/j.mee.2018.01.027
Microelectronic Engineering 192 2019-06-12
2017 Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs
Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication
published pages: 06G302, ISSN: 2166-2754, DOI: 10.1116/1.4991807
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 35/6 2019-06-12

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