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A generic CMOS-compatible platform for co-integrated plasmonics/photonics/electronics PICs towards volume manufacturing of low energy, small size and high performance photonic devices

Total Cost €


EC-Contrib. €






 PLASMOfab project word cloud

Explore the words cloud of the PLASMOfab project. It provides you a very rough idea of what is the project "PLASMOfab" about.

nitride    supporting    practically    aluminum    co    datacom    sio2    library    modulator    sige    metals    gb    eda    monolithic    volume    photonic    sin    manufacturing    fabless    planar    outstanding    waveguides    performances    titanium    sensors    revolutionary    cmos    plasmonics    verified    combining    sensitivity    ic    prototypes    multichannel    electronics    contacts    driving    record    microfluidics    manufactured    seamless    single    plasmofab    thoroughly    fabs    establishing    eco    platform    plasmonic    energy    advantages    paving    performance    electronic    demonstrated    small    compact    wafer    interfaces    inflammation    markers    mass    standardized    fabrication    techniques    speed    nrz    label    free    demonstrating    elementary    complexity    sensor    active    footprint    size    transmitter    electrical    chip    si3n4    si    pics    pool    photonics    integration    compatible    bio    functional    software    biofunctionalization    platforms    copper    ultra    kit    detection    consolidating    commercial   

Project "PLASMOfab" data sheet

The following table provides information about the project.


Organization address
postcode: 54636

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Greece [EL]
 Project website
 Total cost 4˙150˙246 €
 EC max contribution 3˙580˙691 € (86%)
 Programme 1. H2020-EU.2.1.1. (INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT))
 Code Call H2020-ICT-2015
 Funding Scheme RIA
 Starting year 2016
 Duration (year-month-day) from 2016-01-01   to  2018-12-31


Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
2    AMS AG AT (UNTERPREMSTAETTEN) participant 502˙833.00
4    UNIVERSITE DE BOURGOGNE FR (DIJON CEDEX) participant 430˙200.00
6    MELLANOX TECHNOLOGIES LTD - MLNX IL (YOKNEAM) participant 355˙000.00
7    MICRAM MICROELECTRONIC GMBH DE (BOCHUM) participant 281˙265.00
8    PHOENIX BV NL (ENSCHEDE) participant 244˙188.00


 Project objective

PLASMOfab aims to address the ever increasing needs for low energy, small size, high complexity and high performance mass manufactured PICs by developing a revolutionary yet CMOS-compatible fabrication platform for seamless co-integration of active plasmonics with photonic and supporting electronic. The CMOS-compatible metals Aluminum, Titanium Nitride and Copper, will be thoroughly investigated towards establishing a pool of meaningful elementary plasmonic waveguides on co-planar photonic (Si, SiO2 and SiN) platforms along with the associated photonic-plasmonic interfaces. The functional advantages of PLASMOfab technology will be practically demonstrated by developing two novel functional prototypes with outstanding performances: 1) a compact, plasmonic bio-sensor for label-free inflammation markers detection with multichannel capabilities and record-high sensitivity by combining plasmonic sensors with electrical contacts, Si3N4 photonics, high-speed biofunctionalization techniques and microfluidics 2) a 100 Gb/s NRZ transmitter for datacom applications by consolidating low energy and low footprint plasmonic modulator and ultra high-speed SiGe driving electronics in a single monolithic chip. The new integration technology will be verified through wafer-scale fabrication of the prototypes at commercial CMOS fabs, demonstrating volume manufacturing and cost reduction capabilities. PLASMOfab technology will be supported by an EDA software design kit library paving the way for a standardized, fabless plasmonic/photonic IC eco-system.


List of deliverables.
Post-processing and experimental demonstration of the wafer scale transmitter chip Demonstrators, pilots, prototypes 2019-12-05 16:18:22
Press release and communication kit Websites, patent fillings, videos etc. 2019-12-05 16:18:23
Factsheet and project presentation Websites, patent fillings, videos etc. 2019-12-05 16:18:23
Post-processing and experimental demonstration of the wafer scale biosensor chip Demonstrators, pilots, prototypes 2019-12-05 16:18:23
Final press release and communication kit Websites, patent fillings, videos etc. 2019-12-05 16:18:22
Final Publishable Activity Report Documents, reports 2019-12-05 16:18:23
Updated communication kit Websites, patent fillings, videos etc. 2019-12-05 16:18:23
Website development and setup of social accounts Websites, patent fillings, videos etc. 2019-12-05 16:18:23
Experimental evaluation of 100Gb/s transmitter prototypes Demonstrators, pilots, prototypes 2019-12-05 16:18:22
Experimental evaluation of biosensor prototypes Demonstrators, pilots, prototypes 2019-12-05 16:18:23
Physical layer software and process design kit library development Other 2019-12-05 16:18:23
PLASMOfab video presentation Websites, patent fillings, videos etc. 2019-12-05 16:18:23

Take a look to the deliverables list in detail:  detailed list of PLASMOfab deliverables.


year authors and title journal last update
List of publications.
2018 Piotr J. Cegielski, Anna Lena Giesecke, Stefanie Neutzner, Caroline Porschatis, Marina Gandini, Daniel Schall, Carlo A. R. Perini, Jens Bolten, Stephan Suckow, Satender Kataria, Bartos Chmielak, Thorsten Wahlbrink, Annamaria Petrozza, Max C. Lemme
Monolithically Integrated Perovskite Semiconductor Lasers on Silicon Photonic Chips by Scalable Top-Down Fabrication
published pages: 6915-6923, ISSN: 1530-6984, DOI: 10.1021/acs.nanolett.8b02811
Nano Letters 18/11 2019-12-05
2017 Dimitris M. Tsiokos, George Dabos, Dimitra Ketzaki, Jean-Claude Weeber, Laurent Markey, Alain Dereux, Anna Lena Giesecke, Caroline Porschatis, Bartos Chmielak, Thorsten Wahlbrink, Karl Rochracher, Nikos Pleros
Co-integrating plasmonics with Si 3 N 4 photonics towards a generic CMOS compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab approach (Conference Presentation)
published pages: 1024902, ISSN: , DOI: 10.1117/12.2268881
Integrated Photonics: Materials, Devices, and Applications IV 2019-12-05
2017 Christian Haffner, Wolfgang Heni, Delwin L. Elder, Yuriy Fedoryshyn, Nikola Đorđević, Daniel Chelladurai, Ueli Koch, Kevin Portner, Maurizio Burla, Bruce Robinson, Larry R. Dalton, Juerg Leuthold
Harnessing nonlinearities near material absorption resonances for reducing losses in plasmonic modulators
published pages: 2168, ISSN: 2159-3930, DOI: 10.1364/OME.7.002168
Optical Materials Express 7/7 2019-12-05
2016 F. C. Abrecht, R. Bonjour, S. Welschen, A. Josten, B. Baeuerle, D. Hillerkuss, M. Burla, J. Leuthold
Pre-equalization technique enabling 70 Gbit/s photonic-wireless link at 60 GHz
published pages: 30350, ISSN: 1094-4087, DOI: 10.1364/OE.24.030350
Optics Express 24/26 2019-12-05
2017 Florian Strasser, Eva Melnik, Paul Muellner, Pilar Jiménez-Meneses, Magdalena Nechvile, Guenther Koppitsch, Peter Lieberzeit, Michael Laemmerhofer, Rudolf Heer, Rainer Hainberger
Preparation of Mach-Zehnder interferometric photonic biosensors by inkjet printing technology
published pages: 102312H, ISSN: , DOI: 10.1117/12.2267156
Optical Sensors 2017 2019-12-05
2016 Eva Melnik, Florian Strasser, Paul Muellner, Rudolf Heer, Giorgio C. Mutinati, Guenther Koppitsch, Peter Lieberzeit, Michael Laemmerhofer, Rainer Hainberger
Surface Modification of Integrated Optical MZI Sensor Arrays Using Inkjet Printing Technology
published pages: 337-340, ISSN: 1877-7058, DOI: 10.1016/j.proeng.2016.11.113
Procedia Engineering 168 2019-12-05
2017 G. Dabos, A. Manolis, A.L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, D. Tsiokos
TM grating coupler on low-loss LPCVD based Si 3 N 4 waveguide platform
published pages: 35-38, ISSN: 0030-4018, DOI: 10.1016/j.optcom.2017.07.088
Optics Communications 405 2019-12-05
2017 G. Dabos, D. Ketzaki, D. Tsiokos, N. Pleros
Butt-coupled interface between stoichiometric Si 3 N 4 and thin-film plasmonic waveguides
published pages: 1010616, ISSN: , DOI: 10.1117/12.2252254
Integrated Optics: Devices, Materials, and Technologies XXI 2019-12-05
2017 Wolfgang Heni, Christian Haffner, Delwin L. Elder, Andreas F. Tillack, Yuriy Fedoryshyn, Raphael Cottier, Yannick Salamin, Claudia Hoessbacher, Ueli Koch, Bojun Cheng, Bruce Robinson, Larry R. Dalton, Juerg Leuthold
Nonlinearities of organic electro-optic materials in nanoscale slots and implications for the optimum modulator design
published pages: 2627, ISSN: 1094-4087, DOI: 10.1364/OE.25.002627
Optics Express 25/3 2019-12-05
2017 C. Hoessbacher, A. Josten, B. Baeuerle, Y. Fedoryshyn, H. Hettrich, Y. Salamin, W. Heni, C. Haffner, C. Kaiser, R. Schmid, D. L. Elder, D. Hillerkuss, M. Möller, L. R. Dalton, J. Leuthold
Plasmonic modulator with >170 GHz bandwidth demonstrated at 100 GBd NRZ
published pages: 1762, ISSN: 1094-4087, DOI: 10.1364/OE.25.001762
Optics Express 25/3 2019-12-05
2017 Piotr Jacek Cegielski, Stefanie Neutzner, Caroline Porschatis, Holger Lerch, Jens Bolten, Stephan Suckow, Ajay Ram Srimath Kandada, Bartos Chmielak, Annamaria Petrozza, Thorsten Wahlbrink, Anna Lena Giesecke
Integrated perovskite lasers on a silicon nitride waveguide platform by cost-effective high throughput fabrication
published pages: 13199, ISSN: 1094-4087, DOI: 10.1364/OE.25.013199
Optics Express 25/12 2019-12-05
2017 D. Ketzaki, G. Dabos, J. C. Weeber, A. Dereux, D. Tsiokos, N. Pleros
A directional coupling scheme for efficient coupling between Si 3 N 4 photonic and hybrid slot-based plasmonic waveguides
published pages: 1010615, ISSN: , DOI: 10.1117/12.2252193
Integrated Optics: Devices, Materials, and Technologies XXI 2019-12-05
2017 J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, D. Tsiokos
Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths
published pages: 394, ISSN: 1094-4087, DOI: 10.1364/OE.25.000394
Optics Express 25/1 2019-12-05
2018 Christopher Uhl, Horst Hettrich, Michael Moller
\"Design Considerations for a 100 Gbit/s SiGe-BiCMOS Power Multiplexer With 2 $V_{{mathrm{pp}}}$ Differential Voltage Swing\"
published pages: 2479-2487, ISSN: 0018-9200, DOI: 10.1109/jssc.2018.2837054
IEEE Journal of Solid-State Circuits 53/9 2019-12-05
2018 Arne Josten, Benedikt Baeuerle, Romain Bonjour, Wolfgang Heni, Juerg Leuthold
Optical Transmitters without Driver Amplifiers—Optimal Operation Conditions
published pages: 1652, ISSN: 2076-3417, DOI: 10.3390/app8091652
Applied Sciences 8/9 2019-12-05
2017 Delwin L. Elder, Christian Haffner, Wolfgang Heni, Yuriy Fedoryshyn, Kerry E. Garrett, Lewis E. Johnson, Rachael A. Campbell, Jose D. Avila, Bruce H. Robinson, Juerg Leuthold, Larry R. Dalton
Effect of Rigid Bridge-Protection Units, Quadrupolar Interactions, and Blending in Organic Electro-Optic Chromophores
published pages: 6457-6471, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.7b02020
Chemistry of Materials 29/15 2019-12-05
2019 Ueli Koch, Andreas Messner, Claudia Hoessbacher, Wolfgang Heni, Arne Josten, Benedikt Baeuerle, Masafumi Ayata, Yuriy Fedoryshyn, Delwin L. Elder, Larry Dalton, Juerg Leuthold
Ultra-Compact Terabit Plasmonic Modulator Array
published pages: 1-1, ISSN: 0733-8724, DOI: 10.1109/jlt.2019.2899372
Journal of Lightwave Technology 2019-12-05
2018 G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, N. Pleros
CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides
published pages: 12469, ISSN: 1094-4087, DOI: 10.1364/oe.26.012469
Optics Express 26/10 2019-12-05
2018 Christian Haffner, Daniel Chelladurai, Yuriy Fedoryshyn, Arne Josten, Benedikt Baeuerle, Wolfgang Heni, Tatsuhiko Watanabe, Tong Cui, Bojun Cheng, Soham Saha, Delwin L. Elder, Larry. R. Dalton, Alexandra Boltasseva, Vladimir M. Shalaev, Nathaniel Kinsey, Juerg Leuthold
Low-loss plasmon-assisted electro-optic modulator
published pages: 483-486, ISSN: 0028-0836, DOI: 10.1038/s41586-018-0031-4
Nature 556/7702 2019-12-05
2018 Y. Salamin, B. Baeuerle, W. Heni, F. C. Abrecht, A. Josten, Y. Fedoryshyn, C. Haffner, R. Bonjour, T. Watanabe, M. Burla, D. L. Elder, L. R. Dalton, J. Leuthold
Microwave plasmonic mixer in a transparent fibre–wireless link
published pages: 749-753, ISSN: 1749-4885, DOI: 10.1038/s41566-018-0281-6
Nature Photonics 12/12 2019-12-05
2018 B. H. Robinson, L. E. Johnson, D. L. Elder, A. A. Kocherzhenko, C. M. Isborn, C. Haffner, W. Heni, C. Hoessbacher, Y. Fedoryshyn, Y. Salamin, B. Baeuerle, A. Josten, M. Ayata, U. Koch, J. Leuthold, L. R. Dalton
Optimization of Plasmonic-Organic Hybrid Electro-Optics
published pages: 5036-5047, ISSN: 0733-8724, DOI: 10.1109/jlt.2018.2865882
Journal of Lightwave Technology 36/21 2019-12-05
2017 Masafumi Ayata, Yuriy Fedoryshyn, Wolfgang Heni, Benedikt Baeuerle, Arne Josten, Marco Zahner, Ueli Koch, Yannick Salamin, Claudia Hoessbacher, Christian Haffner, Delwin L. Elder, Larry R. Dalton, Juerg Leuthold
High-speed plasmonic modulator in a single metal layer
published pages: 630-632, ISSN: 0036-8075, DOI: 10.1126/science.aan5953
Science 358/6363 2019-12-05
2018 E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, A. Miliou
Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform
published pages: , ISSN: 1557-1955, DOI: 10.1007/s11468-018-0863-7
Plasmonics 2019-12-05
2019 Masafumi Ayata, Yuriy Fedoryshyn, Wolfgang Heni, Arne Josten, Benedikt Baeuerle, Christian Haffner, Claudia Hoessbacher, Ueli Koch, Yannick Salamin, Delwin L. Elder, Larry Dalton, Juerg Leuthold
All-Plasmonic IQ modulator with a 36μm Fiber-to-Fiber Pitch
published pages: 1-1, ISSN: 0733-8724, DOI: 10.1109/jlt.2019.2900797
Journal of Lightwave Technology 2019-12-05
2018 George Dabos, Dimitra Ketzaki, Athanasios Manolis, Laurent Markey, Jean Claude Weeber, Alain Dereux, Anna Lena Giesecke, Caroline Porschatis, Bartos Chmielak, Dimitris Tsiokos, Nikos Pleros
Plasmonic Stripes in Aqueous Environment Co-Integrated With Si3N4 Photonics
published pages: 1-8, ISSN: 1943-0655, DOI: 10.1109/jphot.2018.2792533
IEEE Photonics Journal 10/1 2019-12-05
2018 George Dabos, Athanasios Manolis, Dimitris Tsiokos, Dimitra Ketzaki, Evangelia Chatzianagnostou, Laurent Markey, Dmitrii Rusakov, Jean-Claude Weeber, Alain Dereux, Anna-Lena Giesecke, Caroline Porschatis, Thorsten Wahlbrink, Bartos Chmielak, Nikos Pleros
Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes
published pages: , ISSN: 2045-2322, DOI: 10.1038/s41598-018-31736-4
Scientific Reports 8/1 2019-12-05

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