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MADEin4 SIGNED

Metrology Advances for Digitized ECS industry 4.0

Total Cost €

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EC-Contrib. €

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Partnership

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Project "MADEin4" data sheet

The following table provides information about the project.

Coordinator
APPLIED MATERIALS ISRAEL LTD 

Organization address
address: OPPENHEIMER STREET 9
city: REHOVOT
postcode: 76705
website: n.a.

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Israel [IL]
 Total cost 127˙491˙472 €
 EC max contribution 29˙382˙452 € (23%)
 Programme 1. H2020-EU.2.1.1.7. (ECSEL)
 Code Call H2020-ECSEL-2018-1-IA-two-stage
 Funding Scheme ECSEL-IA
 Starting year 2019
 Duration (year-month-day) from 2019-04-01   to  2022-03-31

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    APPLIED MATERIALS ISRAEL LTD IL (REHOVOT) coordinator 2˙512˙500.00
2    INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM BE (LEUVEN) participant 2˙899˙626.00
3    NOVA MEASURING INSTRUMENTS LTD IL (REHOVOT) participant 1˙988˙750.00
4    STMICROELECTRONICS SRL IT (AGRATE BRIANZA) participant 1˙841˙000.00
5    FEI ELECTRON OPTICS BV NL (EINDHOVEN) participant 1˙710˙500.00
6    COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES FR (PARIS 15) participant 1˙694˙459.00
7    KLA-TENCOR CORPORATION (ISRAEL) IL (MIGDAL HAEMEK) participant 1˙587˙500.00
8    ICT Integrated Circuit Testing GmbH DE (Heimstetten) participant 1˙060˙000.00
9    FIAT CHRYSLER AUTOMOBILES ITALY SPA IT (TORINO) participant 1˙053˙250.00
10    EXCILLUM AB SE (KISTA) participant 934˙843.00
11    NEARFIELD INSTRUMENTS B.V. NL (ROTERDAM) participant 890˙151.00
12    POLITECNICO DI TORINO IT (TORINO) participant 805˙000.00
13    THERMO FISHER SCIENTIFIC (BREMEN) GMBH DE (BREMEN) participant 601˙000.00
14    TOWER SEMICONDUCTOR LTD IL (MIGDAL HAEMEK) participant 600˙000.00
15    MELLANOX TECHNOLOGIES LTD - MLNX IL (YOKNEAM) participant 571˙150.00
16    NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO NL (DEN HAAG) participant 535˙139.00
17    TECHNISCHE UNIVERSITEIT DELFT NL (DELFT) participant 531˙181.00
18    TECHNISCHE UNIVERSITEIT EINDHOVEN NL (EINDHOVEN) participant 526˙742.00
19    ICOS VISION SYSTEMS NV BE (HEVERLEE) participant 524˙351.00
20    SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG HU (BUDAPEST) participant 517˙500.00
21    PRODRIVE TECHNOLOGIES BV NL (SON) participant 497˙812.00
22    NANOMOTION LTD IL (Yokneam) participant 476˙121.00
23    STMICROELECTRONICS CROLLES 2 SAS FR (CROLLES) participant 461˙408.00
24    PHYSIKALISCH-TECHNISCHE BUNDESANSTALT DE (BRAUNSCHWEIG) participant 403˙484.00
25    CONSIGLIO NAZIONALE DELLE RICERCHE IT (ROMA) participant 349˙912.00
26    AVL LIST GMBH AT (GRAZ) participant 320˙522.00
27    COMAU SPA IT (GRUGLIASCO) participant 300˙000.00
28    PVA TEPLA ANALYTICAL SYSTEMS GMBH DE (WESTHAUSEN) participant 295˙000.00
29    INSTITUT MINES-TELECOM FR (PALAISEAU) participant 286˙421.00
30    CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS FR (PARIS) participant 280˙000.00
31    SEMI EUROPE GMBH DE (BERLIN) participant 254˙000.00
32    BRUKER JV ISRAEL LTD IL (MIGDAL HAEMEK) participant 245˙000.00
33    UNIVERSITE D'AIX MARSEILLE FR (Marseille) participant 234˙850.00
34    BRILLIANETOR LTD IL (JERUSALEM) participant 217˙875.00
35    PFEIFFER VACUUM FR (ANNECY) participant 202˙955.00
36    STMICROELECTRONICS ROUSSET SAS FR (ROUSSET) participant 180˙941.00
37    UNITY SEMICONDUCTOR FR (MONTBONNOT-SAINT-MARTIN) participant 153˙205.00
38    AVL DITEST GMBH DE (CADOLZBURG) participant 146˙615.00
39    FLEXIBLE OPTICAL BV NL (DELFT) participant 143˙625.00
40    ARKEMA FRANCE SA FR (COLOMBES) participant 129˙915.00
41    VIRTUAL VEHICLE RESEARCH GMBH AT (GRAZ) participant 118˙868.00
42    OCTO-TECHNOLOGY FR (PARIS) participant 111˙575.00
43    ECP FR (MONTPELLIER) participant 84˙933.00
44    MENTOR GRAPHICS DEVELOPMENT CROLLES SARL FR (MONTBONNOT SAINT MARTIN) participant 59˙996.00
45    IPPON INNOVATION FR (TOULOUSE) participant 42˙768.00
46    GLOBALFOUNDRIES Dresden Module One LLC & Co. KG DE (Dresden) participant 0.00
47    UNIVERSITATEA POLITEHNICA DIN BUCURESTI RO (BUCHAREST) participant 0.00

Map

 Project objective

The metrology domain (which could be considered as the ‘eyes and ears’ for both R&D&I and production) is a key enabler for productivity enhancements in many industries across the electronic components and system (ECS) value chain and have to be an integral part of any Cyber Physical Systems (CPS) which consist of metrology equipment, virtual metrology or Industrial internet of things (IIoT) sensors, edge and high-performance computing (HPC). The requirements from the metrology is to support ALL process steps toward the final product. However, for any given ECS technology, there is a significant trade-off between the metrology sensitivity, precision and accuracy to its productivity. MADEin4 address this deficiency by focusing on two productivity boosters which are independent from the sensitivity, precision and accuracy requirements: • Productivity booster 1: High throughput, next generation metrology and inspection tools development for the nanoelectronics industry (all nodes down to 5nm). This booster will be developed by the metrology equipment’s manufacturers and demonstrated in an industry 4.0 pilot line at imec and address the ECS equipment, materials and manufacturing major challenges (MASP Chapter 15, major challenges 1 – 3). • Productivity booster 2: CPS development which combines Machine Learning (ML) of design (EDA) and metrology data for predictive diagnostics of the process and tools performances predictive diagnostics of the process and tools performances (predictive yield and tools performance). This booster will be developed and demonstrated in an industry 4.0 pilot line at imec, for the 5nm node, by the EDA, computing and metrology partners (MASP Chapter 15, major challenge 4). The same CPS concept will be demonstrated for the ‘digital industries’ two major challenges of the nanoelectronics (all nodes down to 5nm) and automotive end user’s partners (MASP Chapter 9, major challenges 1and 3).

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The information about "MADEIN4" are provided by the European Opendata Portal: CORDIS opendata.

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