PIEZOVOLUME

High volume piezoelectric thin film production process for microsystems

 Coordinatore STIFTELSEN SINTEF 

 Organization address address: Strindveien 4
city: TRONDHEIM
postcode: 7465

contact info
Titolo: Dr.
Nome: Frode
Cognome: Tyholdt
Email: send email
Telefono: +47 917 58 274
Fax: +47 22 06 73 50

 Nazionalità Coordinatore Norway [NO]
 Sito del progetto http://www.piezovolume.com
 Totale costo 5˙140˙345 €
 EC contributo 3˙750˙000 €
 Programma FP7-NMP
Specific Programme "Cooperation": Nanosciences, Nanotechnologies, Materials and new Production Technologies
 Code Call FP7-NMP-2008-SME-2
 Funding Scheme CP-TP
 Anno di inizio 2010
 Periodo (anno-mese-giorno) 2010-01-01   -   2012-12-31

 Partecipanti

# participant  country  role  EC contrib. [€] 
1    STIFTELSEN SINTEF

 Organization address address: Strindveien 4
city: TRONDHEIM
postcode: 7465

contact info
Titolo: Dr.
Nome: Frode
Cognome: Tyholdt
Email: send email
Telefono: +47 917 58 274
Fax: +47 22 06 73 50

NO (TRONDHEIM) coordinator 1˙007˙264.00
2    solar-semi GmbH

 Organization address address: MANFRED VON ARDENNE RING 20
city: Dresden
postcode: 1099

contact info
Titolo: Ms.
Nome: Beuermann
Cognome: Elke
Email: send email
Telefono: +49 7732 940 7441
Fax: +49 7732 940 7451

DE (Dresden) participant 541˙875.00
3    aixACCT Systems GmbH

 Organization address address: Talbotstr. 25
city: AACHEN
postcode: D-52068

contact info
Titolo: Dr.
Nome: Klaus
Cognome: Prume
Email: send email
Telefono: +49 241 9631413
Fax: +49 241 9631411

DE (AACHEN) participant 426˙565.20
4    COVENTOR SARL

 Organization address city: VILLEBON SUR YVETTE
postcode: 91140

contact info
Titolo: Dr.
Nome: Gerold
Cognome: Schröpfer
Email: send email
Telefono: 33169298485
Fax: 33169298485

FR (VILLEBON SUR YVETTE) participant 339˙466.50
5    ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE

 Organization address address: BATIMENT CE 3316 STATION 1
city: LAUSANNE
postcode: 1015

contact info
Titolo: Prof.
Nome: Paul
Cognome: Muralt
Email: send email
Telefono: 41216934957
Fax: 41216935810

CH (LAUSANNE) participant 333˙063.60
6    FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V

 Organization address address: Hansastrasse 27C
city: MUENCHEN
postcode: 80686

contact info
Titolo: Ms.
Nome: Andrea
Cognome: Zeumann
Email: send email
Telefono: 498912000000
Fax: 498912000000

DE (MUENCHEN) participant 305˙141.25
7    OC OERLIKON BALZERS AG

 Organization address address: IRAMALI 18
city: BALZERS
postcode: 9496

contact info
Titolo: Dr.
Nome: Bernd
Cognome: Heinz
Email: send email
Telefono: 4233884475
Fax: 4233885426

LI (BALZERS) participant 290˙952.50
8    SONITOR TECHNOLOGIES AS

 Organization address address: FORSKNINGSVEIEN 1B
city: OSLO
postcode: 314

contact info
Titolo: Dr.
Nome: Wilfred
Cognome: Booij
Email: send email
Telefono: 4792453574
Fax: 4722595041

NO (OSLO) participant 236˙876.40
9    VERMON SA

 Organization address address: RUE DU GENERAL RENAULT 180
city: TOURS CEDEX 1
postcode: 37038

contact info
Titolo: Mr.
Nome: Jean-Yves
Cognome: Corduan
Email: send email
Telefono: 33247374278
Fax: 33247381545

FR (TOURS CEDEX 1) participant 183˙615.75
10    OCE TECHNOLOGIES B.V.

 Organization address address: SINT URBANUSWEG 43
city: VENLO
postcode: 5914 CA

contact info
Titolo: Mr.
Nome: Rinus
Cognome: Groeneveld
Email: send email
Telefono: +31 77 359 3539
Fax: +31 77 359 5496

NL (VENLO) participant 85˙179.80

Mappa


 Word cloud

Esplora la "nuvola delle parole (Word Cloud) per avere un'idea di massima del progetto.

piezoelectric    device    piezovolume    mems    sensors    industry    smes    volume    microsystems    time    providers    piezomems   

 Obiettivo del progetto (Objective)

'This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS. As a consequence, they are very attractive for industries like automotive, aerospace, medical, telecom and consumer electronics. Large European companies tend to buy devices like sensors for their products, rather than to develop processes and devices themselves. European SMEs are natural providers of such devices. However, since there are no automated facilities in Europe for volume production of piezoelectric microsystems, they are not able to commercialize piezoMEMS products. A combined effort by European research institutes, industry and SMEs can close this gap. The main vision of piezoVolume is to provide the means for high throughput, cost-effective and robust manufacturing of piezoelectric microsystems in Europe, where SMEs are both device developers and production technology providers. A set of procedures, guidelines and fabrication tools will be developed, enabling short time to market for new device concepts. piezoVolume will combine three leading research groups in Europe, which are already acting worldwide in the piezoMEMS scientific community, with highly relevant and skilled technological partners, to build a consortium that is able to develop a full production line for piezoMEMS in Europe for the first time. Readily available cost-effective wafer based batch processing of piezoMEMS will lower the threshold for industry acceptance and be the enabling technology to realise new products based on piezoMEMS.'

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