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R3-PowerUP SIGNED

300mm Pilot Line for Smart Power and Power Discretes

Total Cost €

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EC-Contrib. €

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Partnership

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Project "R3-PowerUP" data sheet

The following table provides information about the project.

Coordinator
STMICROELECTRONICS SRL 

Organization address
address: VIA C.OLIVETTI 2
city: AGRATE BRIANZA
postcode: 20864
website: www.st.com

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country Italy [IT]
 Project website https://r3powerup.eu/
 Total cost 180˙318˙047 €
 EC max contribution 28˙046˙206 € (16%)
 Programme 1. H2020-EU.2.1.1.7. (ECSEL)
 Code Call H2020-ECSEL-2016-2-IA-two-stage
 Funding Scheme ECSEL-IA
 Starting year 2017
 Duration (year-month-day) from 2017-11-01   to  2022-04-30

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    STMICROELECTRONICS SRL IT (AGRATE BRIANZA) coordinator 23˙244˙092.00
2    ROBERT BOSCH GMBH DE (GERLINGEN-SCHILLERHOEHE) participant 594˙086.00
3    CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA IT (BOLOGNA) participant 385˙000.00
4    ICOS VISION SYSTEMS NV BE (HEVERLEE) participant 318˙000.00
5    APPLIED MATERIALS ISRAEL LTD IL (REHOVOT) participant 300˙000.00
6    PICOSUN OY FI (ESPOO) participant 300˙000.00
7    KLA-Tencor MIE GmbH DE (Weilburg) participant 276˙250.00
8    BESI AUSTRIA GMBH AT (RADFELD) participant 240˙000.00
9    ADVANCED PACKAGING CENTER BV NL (DUIVEN) participant 170˙000.00
10    SIEC BADAWCZA LUKASIEWICZ - INSTYTUT TECHNOLOGII ELEKTRONOWEJ PL (WARSZAWA) participant 139˙650.00
11    GREEN POWER TECHNOLOGIES SL ES (BOLLULLOS DE LA MITACION SEVILLA) participant 125˙000.00
12    CONSIGLIO NAZIONALE DELLE RICERCHE IT (ROMA) participant 122˙500.00
13    POLITECNICO DI TORINO IT (TORINO) participant 122˙500.00
14    UNIVERSITA DEGLI STUDI DI PAVIA IT (PAVIA) participant 122˙500.00
15    UNIVERSITA DI PISA IT (PISA) participant 122˙500.00
16    DISCO HI-TEC EUROPE GMBH DE (KIRCHHEIM) participant 120˙000.00
17    UNIVERSIDAD DE SEVILLA ES (SEVILLA) participant 106˙163.00
18    VYSOKE UCENI TECHNICKE V BRNE CZ (BRNO STRED) participant 105˙000.00
19    NOVA MEASURING INSTRUMENTS LTD IL (REHOVOT) participant 100˙000.00
20    SILTRONIC AG DE (MUNCHEN) participant 100˙000.00
21    SOITEC SA FR (BERNIN) participant 99˙995.00
22    SLOVENSKA TECHNICKA UNIVERZITA V BRATISLAVE SK (BRATISLAVA) participant 98˙000.00
23    AP&S INTERNATIONAL GMBH DE (DONAUESCHINGEN) participant 93˙750.00
24    EV GROUP E. THALLNER GMBH AT (ST FLORIAN AM INN) participant 92˙802.00
25    ANCOSYS GMBH DE (PLIEZHAUSEN) participant 80˙000.00
26    INSTITUT MIKROELEKTRONICKYCH APLIKACI S.R.O. CZ (PRAHA 5 - SMICHOV) participant 74˙531.00
27    LAM RESEARCH SAS FR (MEYLAN) participant 70˙000.00
28    LASER SYSTEMS & SOLUTIONS OF EUROPE FR (GENNEVILLIERS) participant 59˙733.00
29    APPLIED MATERIALS IRELAND LIMITED IE (MAYNOOTH) participant 54˙791.00
30    ASM EUROPE BV NL (ALMERE) participant 52˙950.00
31    TRITEM SPOLKA Z OGRANICZONA ODPOWIEDZIALNOSCIA PL (KATOWICE) participant 50˙000.00
32    NANO DESIGN SRO SK (BRATISLAVA) participant 42˙500.00
33    ATOTECH DEUTSCHLAND GMBH DE (BERLIN) participant 40˙000.00
34    APPLIED MATERIALS FRANCE FR (BERNIN) participant 23˙911.00
35    UNIVERSITATEA POLITEHNICA DIN BUCURESTI RO (BUCHAREST) participant 0.00

Map

 Project objective

R3-POWERUP will push through the new generation of 300mm Pilot Line Facility for Smart Power technology in Europe. This will enable the European industry to set the world reference of innovative and competitive solutions for critical societal challenges, like Energy saving and CO2 Reduction (ref. to COP21 Agreement ), as well as Sustainable Environment through electric mobility and industrial power efficiency.

● Development and demonstration of a brand new 300mm advanced manufacturing facility addressing a multi-KET Pilot Line (i.e. Nanoelectronics, Nanotechnology, Advanced Manufacturing) ● Improvement in productivity and competitiveness of integrated IC solutions for smart power and power discrete technologies.

The strategy of the project is the following: ● The Pilot Line will enable the realization of sub-100nm Smart Power processes, starting from the 90nm BCD10 process, taking profit from the advanced and peculiar equipments available only for 300mm wafer size. ● The availability of a 300mm full processing line will also exploit the portability to 300mm of the most critical and expensive process steps devoted to power discrete devices. ● The Pilot Line will build on Digital Factory and Industry 4.0 principles, enforcing a flexible, adaptive and reliable facility, in order to investigate also the synergy and economic feasibility of supporting both Smart Power and power discrete processes in the same manufacturing line. ● The application of such technologies will be a breakthrough enabler for Energy Efficiency and CO2 Reduction worldwide, in line with COP21’s global action plan.

The Pilot Line is based on three main pillars: 1. Market driven continuous innovation on smart-power and power discrete; 2. Industrial policy focused on high quality and mass production’s cost optimization; 3. Set the ground for future wafer upgrade of “More than Moore” disruptive technologies (e.g. advanced MEMS manufacturing, now at 200mm)

 Deliverables

List of deliverables.
D6.1.3 Documents, reports 2020-04-16 13:43:02
D6.1.1 Websites, patent fillings, videos etc. 2020-03-11 17:04:40
D6.1.2 Documents, reports 2020-03-11 17:04:40

Take a look to the deliverables list in detail:  detailed list of R3-PowerUP deliverables.

 Publications

year authors and title journal last update
List of publications.
2018 Andrea Natale Tallarico, Susanna Reggiani, Riccardo Depetro, Stefano Manzini, Andrea Mario Torti, Giuseppe Croce, Enrico Sangiorgi, Claudio Fiegna
Hot-Carrier Degradation in Power LDMOS: Drain Bias Dependence and Lifetime Evaluation
published pages: 5195-5198, ISSN: 0018-9383, DOI: 10.1109/ted.2018.2867650
IEEE Transactions on Electron Devices 65/11 2020-03-11
2018 S. Reggiani, M. Rossetti, A. Gnudi, A.N. Tallarico, A. Molfese, S. Manzini, R. Depetro, G. Croce, E. Sangiorgi, C. Fiegna
TCAD investigation on hot-electron injection in new-generation technologies
published pages: 1090-1093, ISSN: 0026-2714, DOI: 10.1016/j.microrel.2018.07.097
Microelectronics Reliability 88-90 2020-03-11

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The information about "R3-POWERUP" are provided by the European Opendata Portal: CORDIS opendata.

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